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コンピュータグラフィックスによる超拡散原子の連続的な表示モデル(アニメーション) : (1)表面拡敬 Continuous Display M ode Is (Animation) of Superdiffusion Atoms in Semiconductors by Computer Graphics : (1) surf ace diffusion 長尾, 浩道 ナガオ, ヒロミチ Nagao, Hiromichi 和田, 隆夫 ワダ, タカオ Wada, Takao 表面拡散 表面の活性化障壁 キツクアウト機構 不純物シート アニメーション コンピュータグラフィツクス surface diffusion activation energy of surface kick-out mechanism Impurity sheet animation computer graphics Electron beam dopings are impurity doping processes that impurity sheets are overlaid on the substrate and these surfaces are irradiated by electron beam. In this experiment, an overlayer of Ge sheet was placed on a Si substrate, and the overlayer was irradiated partially by an electron beam of 7 MeV. It was observed by a secondary ion mass spectrometry (SIMS) that displaced atoms in the impurity sheet migrated to its surface and diffused to the unirradiated region. We continued the discussion of further study of the surface diffusion. The animation of a continuous display superdiffusion model by computer graphyics was collectively presented by several continuous elemental processes of superdiffusion atoms in semiconductors. departmental bulletin paper 名古屋産業大学・名古屋経営短期大学環境経営研究所 2003-03 application/pdf 名古屋産業大学・名古屋経営短期大学環境経営研究所年報 2 34 45 Bulletin of Institute of Environmental Management, Nagoya Sangyo University, Nagoya Management Junior College AA11652450 13475886 https://meisandai.repo.nii.ac.jp/record/284/files/第２号３４－４５.pdf https://doi.org/10.14995/00000270 https://meisandai.repo.nii.ac.jp/records/284 jpn 40007205270